precision profilometer

4D Technology

  • Roughness measurement according to ISO 25178
  • Quantification of the smallest roughnesses -> down to 1 Å
  • Production process monitoring
  • Handheld, workstation or robotic operation
  • independent of vibrations

Contact person: Mr. Thomas Walter

Versatile precision profilometer for research and industry

The precision profilometer NanoCam HD from 4D Technology is a sophisticated measuring device for precise analysis of surface roughness. It enables non-contact measurement of surface structures with sub-Angstrom resolution and is ideal for applications in optics, semiconductor industry and materials science. Thanks to its compact design and the possibility of integration into automated systems, the NanoCam HD offers maximum flexibility for a wide range of measuring tasks.

Technical features

The precision profilometer NanoCam HD uses patented Dynamic Interferometry® technology to perform fast and precise measurements. With a vertical resolution of up to 1 Å and a measurement time of less than 100 microseconds, it delivers reliable results, even in vibration-rich environments. The integrated 5-megapixel camera with 12-bit depth and the 460 nm LED light enable detailed capture of the surface topography. The included 4Sight Focus™ software offers extensive analysis functions according to ISO 25178 and supports the evaluation of 2D and 3D surface profiles.

Application areas of the precision profilometer

The precision profilometer NanoCam HD is used in various areas of research and industry. In the optics industry it is used for quality control of lenses and mirrors. In semiconductor manufacturing, it enables the monitoring of surface roughness on wafers. It is also used in materials science to characterize surface structures. Thanks to its ability to be integrated into automated manufacturing processes, the NanoCam HD is also suitable for use in series production.

Specifications

Vertical resolution: from 1 Å (depending on the lens)
Measurement field size: 0.42 – 9.4mm (with standard lenses)
Objectives: 0.9X - 50X
LED: 460nm
Camera: 5MP, 12bit
Dimensions: 250mm x 250mm x 90mm
Weight: 5.3 kg
Robot suitability: YES

Applications

  • Roughness measurement on mirrors for telescopes
  • Finish for optics in the laser area
  • Checking the roughness parameters on polished sheets

measuring ranges

Roughness: from 1 Å – 115nm
Minimum roughness: 1 Å
Measuring time: ~0.1sec
Reflectivity: 0.5-100%
Surfaces: almost all substrates

Options

  • handheld or robotic
  • Calibration standards according to all international standards
  • different lenses
  • external control panel

data sheet

NanoCam_HD_Data_Sheet

Video

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