film thickness measuring systems

  • semiconductor production
  • resist structures
  • Hard coatings, e.g. in automobile construction
  • liquid crystal displays
  • and all kinds of optical coatings

Contact person: Michael Zerbin

The film thickness gauges from Semiconsoft are ideal for measuring thin transparent layers in the thickness range from 1nm to 2mm. The principle is based on the laws of reflectometry.

These spectrometers also offer the possibility of viewing several layers lying on top of one another and determining their thickness. With the systems from Semiconsoft, you primarily acquire flexible and adaptable measuring devices. These can be expanded as required in the event of changes in the production process. Compared to conventional ellipsometers, the cost aspect comes to the fore.

The various setups are excellently suited both in the laboratory as a single measuring system or inline for automated measurements. In addition, larger areas can also be viewed using the sophisticated mapping function.

Applications

  • semiconductor products
  •  resist structures
  • Hard coatings in automotive construction
  •  liquid crystal displays
  • PCBA coatings
  • Photoresist and parylene measurements
  • all kinds of optical coatings

details

  • Thickness range: 1nm -2mm
  • Accuracy: 1nm
  • Spot size: 2µm to 200µm
  • Sample size: up to 200mm
  • Database: more than 500 different pre-stored materials

Options

  • Stand-alone, in-situ, in-line measuring systems
  • Adapter manual measurements
  • System setups with and without microscope
  • Lenses and light sources adjustable
  • mapping function
  • Digital camera for screen display
  • manual or electric moveable tables
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