AccuSizer Mini systems for monitoring CMP slurries
The AccuSizer Mini system was developed with a modular design that allows sensors and fluidic options to be adapted to the customer's slurry and process equipment. The systems deliver results with the highest accuracy and resolution, quickly and at higher count rates than any other technology. This improves statistics and ensures the detection of high particle counts (LPC), which reduce yield.
A variety of customized “autodilution” modules ensures that the perfect concentration for measurement is delivered to the sensor.
Using SPOS (Single Particle Optical Sizing) technology, the systems deliver results of the highest accuracy.
They are ideally suited for continuous monitoring of LPC in CMP slurry feed systems and as a tool for optimizing filtration and other process conditions.
AccuSizer Mini FX System
Range: 0.65 – 20 µm, up to 106 particles/ml
Single-stage dilution fluidics
Ideal for CMP slurries made from cerium oxide
AccuSizer Mini LE System
Range: 0.5 – 400 µm, up to 10,000 particles/mL
One- or two-stage dilution fluidics
Ideal for silica CMP slurries
AccuSizer Mini FX-Nano System
Range: 0.15 – 10 µm, up to 106 particles/mL
Exponential dilution fluidics
Ideal for clean, colloidal CMP slurries
If you have any further questions about the systems, please feel free to send us a non-binding inquiry. Further information about the products and all technical data sheets for each variant can be found here: Entegris.com.
