Particle measurement - Sensors
Precise sensor solutions for AccuSizer particle measurement systems
Entegris offers a comprehensive range of sensors for AccuSizer particle sizers to optimally cover a wide variety of measurement requirements. These sensors are designed for precise particle size analysis and concentration determination and utilize state-of-the-art light shading and light scattering technology. Our team will support you in selecting the right sensor to ensure the highest accuracy and reliability in your application.
Sensor variants and their properties
- LE400-05 - Measuring range 0.5 to 400 µm, combined light shading and scattering, summation calibration, particle sensitivity up to 10 PPT, concentration limit 9000 particles/mL, size accuracy ±2 %, counting accuracy ±10 %, recommended flow rate 60 ml/min (calibratable).
- LE1000-2 - Measuring range 2 to 1000 µm, light shading and summation, concentration limit 4000 particles/mL, flow rate 100 ml/min.
- LE2500-20 - Measuring range 25 to 2500 µm, light shading and summation, concentration limit 2000 particles/mL, flow rate 600 ml/min.
- FX sensor - Measuring range 0.70 to 20 µm, light shading with patented beam focusing, significantly higher concentration limits than conventional SPOS technology (up to 400-fold).
- FX Nano - Measuring range 0.15 to 20 µm, light shading with patented beam focusing, concentration limits up to 200 times higher than standard sensors.
- FX / FX Nano combined with LE400 - Increased dynamics for the analysis of outlier particles in the range 0.15 to 150 µm. Requires special measurement and data acquisition system.
- HFX - Hydro Focused Extinction Sensor for extremely high particle concentrations above 10 million particles/mL. The patented sheath flow design enables measurements in native concentration without contact to the flow cell.
Advantages of Entegris sensors
All sensors are designed for maximum measurement precision and stability. They offer extended measuring ranges, high dynamics and special calibration procedures to precisely analyze even the most demanding samples.
Areas of application
The sensors are used in laboratories, pharmaceutical production, water and environmental analysis as well as in industrial quality control. Depending on the sensor type, both very fine particles and large concentration ranges can be reliably detected.
Contact and advice
For individual advice and detailed technical information on the available sensors, please contact us directly. Visit our product page at Particle measurement - Sensors. Further technical information on particle measurement technology can be found at SPIE - The International Society for Optics and Photonics.


