AccuSizer Mini systems for monitoring CMP slurries
The AccuSizer Mini Process Monitoring/Particle Sizer System was developed with a modular design that allows sensors and fluidic options to be customized to the customer's slurry and process equipment. The systems deliver results with the highest accuracy and resolution, quickly and at higher count rates than any other technology. This improves statistics and ensures the detection of high particle counts (LPCs), which reduce yield.
A variety of customized “autodilution” modules ensures that the perfect concentration for measurement is delivered to the sensor.
Using SPOS (Single Particle Optical Sizing) technology, the systems deliver results of the highest accuracy.
They are ideally suited for continuous monitoring of LPC in CMP slurry feed systems and as a tool for optimizing filtration and other process conditions.
AccuSizer Mini FX System
Range: 0.65 – 20 µm, up to 106 particles/ml
Single-stage dilution fluidics
Ideal for CMP slurries made from cerium oxide
AccuSizer Mini LE System
Range: 0.5 – 400 µm, up to 10,000 particles/mL
One- or two-stage dilution fluidics
Ideal for silica CMP slurries
AccuSizer Mini FX-Nano System
Range: 0.15 – 10 µm, up to 106 particles/mL
Exponential dilution fluidics
Ideal for clean, colloidal CMP slurries
Technical features
The AccuSizer Mini systems are characterized by their high flexibility and adaptability. The modular design allows individual configuration of sensors and fluidic options according to the customer's specific requirements. The systems deliver fast, high-resolution results with count rates that exceed those of other technologies. This improves statistical accuracy and enables reliable detection of large particle counts (LPC), which can reduce yield.
A variety of customized auto-dilution modules ensures that the optimal concentration for measurement is delivered to the sensor. The SPOS technology enables the precise measurement of individual particles, resulting in results of the highest accuracy. The systems are ideally suited for continuous monitoring of LPC in CMP sludge feed systems and serve as a tool for optimizing filtration and other process conditions.
Areas of application of process monitoring
The Process monitoring The AccuSizer Mini particle size measuring device is used in various areas of semiconductor manufacturing and materials science. In the monitoring of CMP sludges, they enable the early detection of impurities and aggregations that can lead to defects. This is crucial for quality assurance and the optimization of manufacturing processes. In addition, the systems are used in research and development to analyze the properties of new materials and improve processes.
If you have any further questions about the systems, please feel free to send us a non-binding inquiry. Further information about the products and all technical data sheets for each variant can be found here: Entegris.com.
